JPH0334178B2 - - Google Patents
Info
- Publication number
- JPH0334178B2 JPH0334178B2 JP57038155A JP3815582A JPH0334178B2 JP H0334178 B2 JPH0334178 B2 JP H0334178B2 JP 57038155 A JP57038155 A JP 57038155A JP 3815582 A JP3815582 A JP 3815582A JP H0334178 B2 JPH0334178 B2 JP H0334178B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- ion
- ions
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 61
- 230000000694 effects Effects 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000005315 distribution function Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000004157 plasmatron Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000005658 nuclear physics Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57038155A JPS58157036A (ja) | 1982-03-12 | 1982-03-12 | イオン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57038155A JPS58157036A (ja) | 1982-03-12 | 1982-03-12 | イオン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58157036A JPS58157036A (ja) | 1983-09-19 |
| JPH0334178B2 true JPH0334178B2 (en]) | 1991-05-21 |
Family
ID=12517513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57038155A Granted JPS58157036A (ja) | 1982-03-12 | 1982-03-12 | イオン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58157036A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03266346A (ja) * | 1990-03-14 | 1991-11-27 | Toshiba Corp | イオン生成装置 |
-
1982
- 1982-03-12 JP JP57038155A patent/JPS58157036A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58157036A (ja) | 1983-09-19 |
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